Template:Announcements

From UCSB Nanofab Wiki
Revision as of 20:57, 23 February 2019 by Silva (talk | contribs)
Jump to navigation Jump to search

Equipment Status

Suss Bonder

Suss fieldservice found several issues with the system. Suss will evaluate the issues and recommend possible solutions. // Silva 21:36, 13 February 2019 (PST)

E-Beam#1

The system is down. The E-Beam#1 power supply and control upgrade started today. We hope to complete the process within 10 business days. We will keep you posted as progress is made. // Silva 21:45, 11 February 2019 (PST)

ICP Panasonic#1

The system is down. There is a lost wafer in the process chamber. Don will address the issue on Monday. Silva 20:57, 23 February 2019 (PST)

ASML DUV: PM March 12 to 15th

ASML will be performing their periodic maintenance on the DUV stepper from Tuesday March 12th through Friday March 15th. Please schedule your work accordingly. // John d 11:02, 15 February 2019 (PST)