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Revision as of 09:25, 5 February 2019 by Silva (talk | contribs) (→‎SUSS MA6)
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Equipment Status

Suss Bonder

The system is down. We are waiting for fieldservce. Silva 10:18, 4 February 2019 (PST)

KLA Tencor Surfscan

The system is down. We are sourcing a replacement PCB. Silva 10:20, 4 February 2019 (PST)

ALD Metal Dep

The system is down. The lead time for the replacement turbo pump is three weeks. Silva 10:44, 4 February 2019 (PST)


The system is down. The vendor is coming to PM the system and look at the lamp power supply. The system should be ready to use by 5 pm. Silva 09:25, 5 February 2019 (PST)