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UCSB NanoFab Announcements
ASML Stepper: Down
We have identified an issue with the Wafer Stage X-Direction Stator. It is currently under repair. // John d 10:55, 18 December 2018 (PST)
Lab Shutdown: Dec 27 + 28
We will be having our yearly lab shutdown on *Thursday, December 27th and Friday, December 28th* to sanitize our DI water system and for general fab maintenance. We will send out an email Friday afternoon when the lab is ready to use. // John d 15:21, 12 December 2018 (PST)
New Filmetrics Systems
A Filmetrics F10-RT for optical reflection/transmission spectra, and a Filmetrics F50 thin-film wafer-mapping system have been installed. Trainings will be announced once operating procedures have been developed. Contact Ning Cao for more info. // John d 15:21, 12 December 2018 (PST)