Template:Announcements

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Revision as of 06:38, 15 August 2018 by John d (talk | contribs) (PECVD software upgrade)
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UCSB NanoFab Announcements

PECVD#1: Software Upgrade

Plasmatherm will be upgrading the system software on September 17th. The upgrade will take 3-5 days. After the upgrade is complete, everyone must be re-certified to use the tool. Please document any custom recipes that you may have, in case they can't be copied over. // John d 06:38, 15 August 2018 (PDT)

Ebeam#2: heater inoperable

The heater is damaged beyond our ability to repair it. We have contacted the vendor and asked for an "expedited" repair if possible. // John d 13:51, 25 July 2018 (PDT)

RIE#5: SiCl4 Issue

We have a flow rate problem on the SiCl4 gas line. You can only flow the SiCl4 for 5 minutes and then you have to wait 5 minutes before you flow it again. So in order to to do a 10 minute Etch you will have to do it in three steps flow 5 mi, wait 5mi, then flow 5min. // John d 17:22, 15 June 2018 (PDT)

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