Template:Announcements

UCSB NanoFab Announcements

RIE#5: SiCl4 Up

SiCl4 gas is available again on RIE #5.The maximum flow rate is 10 sccm. // John d 16:17, 12 June 2018 (PDT)

AFM Down

The laser/laser focus is struggling on the AFM. We have taken the AFM head to Bruker for a tune-up/repair. The system will be down until some time this week. // John d 16:17, 12 June 2018 (PDT)

Solvent Bench Bay 7 - Heated Bath

We have disabled the auto refill due to a high water level. Please use the manual fill and a manual drain button at the center top of the head case. Users of the bath might need to fill or drain as you insert/remove your beakers. Please be careful with other user's beakers. // John d 17:18, 6 June 2018 (PDT)

PECVD#2 is Up; Retraining Required

The Plasma Therm Cortex software update is complete, and the system is operational. Standard recipes requalified. Particle counts are now much lower and around historical levels. All users need retraining on the new software. Contact Mike Silva for training. // Thibeault 17:25, 24 May 2018 (PDT)