Template:Announcements

UCSB NanoFab Announcements

RIE#5 Up, SiCl4 now available

SiCl4 is available for use. We tried a new line heater on the SiCl4 and that seemed to do the trick. The system is still pumping slow but is getting better. // John d 15:00, 27 April 2018 (PDT)

JEOL SEM #2: DOwn Monday

A JEOL service engineer will be here Monday morning 4/30 to look at the loading issue. Tool down until the service is complete. // John d 10:45, 30 April 2018 (PDT)

PECVD#2: Down, Retraining required

The Plasma Therm Cortex software update is complete, and the system is operational. We still have some work to do before we start training users. We need to check particulate counts, and we need to qualify all the standard process recipes. If everything goes well with particulates, and film quality, we will start training sessions early next week. // John d 16:48, 26 April 2018 (PDT)

Stepper #2 AutoStep: UP

One RMS motor and motor control board was replaced. I ran setup without error. The system is up and ready for your use. // John d 12:50, 25 April 2018 (PDT)

Cary 500 Down

UV-Vis Detector Failure. Tool is able to used from 600nm and up. Looking into replacement options. // Posted: 13:47, 12 February 2018 (PST)