Template:Announcements

UCSB NanoFab Announcements

Plasma-Therm DSEiii: repair in progress

The wafer clamp cracked. Replacement is being installed. // John d (talk) 13:57, 20 March 2018 (PDT)

EBeam #4: Down for Upgrades

The upgrade is complete and working well. All users will be required to be trained again. The high voltage, sweep and turret controls are all new. Training sessions will be at 9am, 10am, 11am and 4pm Tuesday , 9am, 10am and 11am Wednesday. I will arrange other "retraining" sessions next week. // John d (talk) 13:57, 20 March 2018 (PDT)

PECVD #2: UP with possible High Particulates

We are still experiencing high particle counts in the Advanced Vacuum PECVD process. Our next step is to replace the Silane MFC. I will update you once I have a lead time on the new MFC. Most likely it will take several weeks to receive. Until then, the system is operational and can be used if your process is not sensitive to high particle counts. // Posted: 13:22, 19 March 2018 (PDT)

Gasonics: Up

The process chamber mechanical pump is struggling to make base pressure but the system is able to successfully run. We are waiting for the replacement pump to be repaired and returned. // Posted: 10:14, 12 February 2018 (PST)

Cary 500 Down

UV-Vis Detector Failure. Tool is able to used from 600nm and up. Looking into replacement options. // Posted: 13:47, 12 February 2018 (PST)