Template:Announcements

UCSB NanoFab Announcements

EBeam #4: Down for Upgrades

Down through the week of Monday the 12th, installing new HV/Sweep controller.

Users will need retraining on these new components once the system is back up. // [[User:John d|Posted:] 09:50, 6 March 2018 (PST)

PECVD #2: Down

The Advanced Vacuum PECVD#2 is DOWN. We will continue the troubleshooting in the morning.

We have established that there is no external atmospheric leaks in the system. We still have no explanation for the high particulate count. The troubleshooting will continue next week. // Posted: 11:03, 16 March 2018 (PDT)

Stepper #2 Maintenance

The vendor will be servicing the GCA Autostep on Thursday March 15, 2018 at 8:00AM. The system will be up and running later that afternoon. Please plan your process accordingly. // Posted: 07:40, 21 February 2018 (PST)

Stepper #1 Maintenance Complete

3C is finished with the maintenance on the 6300 and the system is ready to use. Please let us know immediately if you encounter any issues. // Posted: 11:04, 16 March 2018 (PDT)

Gasonics: Up

The process chamber mechanical pump is struggling to make base pressure but the system is able to successfully run. We are waiting for the replacement pump to be repaired and returned. // Posted: 10:14, 12 February 2018 (PST)

Cary 500 Down

UV-Vis Detector Failure. Tool is able to used from 600nm and up. Looking into replacement options. // Posted: 13:47, 12 February 2018 (PST)