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Revision as of 07:08, 21 June 2019 by Thibeault (talk | contribs)
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Equipment Status

Suss Bonder

Suss Bonder is DOWN. Suss field service is sourcing replacement parts for the bonder repair. An update will be sent out once we have a date scheduled for the service. Silva 10:45, 12 April 2019 (PDT)

SLR Fluorine ICP Etch

The turbo upgrade on the SLR Fluorine ICP Etch will start Thursday June 20, 2019 and will conclude Friday afternoon. Silva 07:57, 19 June 2019 (PDT)

ASML Stepper #3: System Up

ASML PM complete - System up // Thibeault 08:08, 21 June 2019 (PDT)