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Revision as of 11:56, 28 May 2019 by John d (talk | contribs) (deleted Lab Open fan exhaust maintenance)
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Equipment Status

Suss Bonder

Suss Bonder is DOWN. Suss field service is sourcing replacement parts for the bonder repair. An update will be sent out once we have a date scheduled for the service. Silva 10:45, 12 April 2019 (PDT)

SLR Fluorine ICP Etch

The turbo upgrade has been postponed. I will update you once the new installation date has been established. Silva 10:19, 28 May 2019 (PDT)

GCA Autostep June Maintenance

The vendor will be working on the GCA Autostep 200 starting Monday June 10, 2019 at 9:00 am. Service will be complete Wednesday June 12, 2019 early evening. The system will be available in the evening during each day of service. Please plan your process accordingly. Silva 10:24, 28 May 2019 (PDT)

GCA 6300 June Maintenance

The GCA 6300 will be serviced Thursday June 13, 2019 starting at 8:30 am. The service will be finished late afternoon. Please schedule your process accordingly. Silva 10:24, 28 May 2019 (PDT)

ASML Stepper #3: Periodic Maintenance

ASML will be performing their quarterly maintenance on Stepper #3 from Monday June 17th to Friday June 21st. Exact days may vary, we will email updates when we know exactly which days the tool will be closed. // John d 12:55, 28 May 2019 (PDT)