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Revision as of 08:50, 29 April 2020 by John d (talk | contribs) (bumped COVID closure post, link to BThibeault page)
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Equipment Status

NanoFab Closure

Following guidelines provided by our Office of Research, we will be closing the UCSB Nanofabrication Facility for regular use, effective Tuesday, March 17 at 5pm.

On a limited basis, our Facility can consider access to users to perform “critical activities.”

Please see email for complete details, titled "Closure of Nanofab to implement University Ramp Down Policy" sent on Tue, Mar 17, 2020 at 9:24 AM PDT. Contact the Lab Director for more information. // John d 11:42, 01 April 2020 (PDT)

ASML Maintenance cancelled

Cancelled until further notice // Thibeault 14:20, 26 March 2020 (PDT)


The ICP-PECVD module is available upon request. Contact Tony Bosch if interested. System is using deuterated Silane for low loss optical films use only. //Thibeault 14:22, 26 March 2020 (PDT)