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Revision as of 10:42, 17 March 2020 by John d (talk | contribs) (added NanoFab closure)
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Equipment Status

NanoFab Closure: March 17 at 5pm

Following guidelines provided by our Office of Research, we will be closing the UCSB Nanofabrication Facility for regular use, effective Tuesday, March 17 at 5pm. On a limited basis, our Facility can consider access to users to perform “critical activities.”

Please see email for complete details, titled "Closure of Nanofab to implement University Ramp Down Policy" sent on Tue, Mar 17, 2020 at 9:24 AM PDT. // John d 11:42, 17 March 2020 (PDT)

ASML Maintenance: March 30th

ASML Stepper #3 periodic maintenance will be on Monday March 30th, system will be down for up to 1.5 weeks. // John d 07:30, 27 January 2020 (PST)


The ICP-PECVD module is down for general use. We are conducting experiments with the Deuterated Silane and are not allowing general use of the tool. Silva 15:04, 19 November 2019 (PST)