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Revision as of 12:15, 4 October 2019 by John d (talk | contribs) (ASML down - TCU, minimal info)
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Equipment Status

ASML Stepper #3: DOWN

Failure of the Temperature Control Unit on the ASML. This unit controls the lens and stage temperatures among other things. Please see emails for updates. // John d 13:15, 4 October 2019 (PDT)


RIE#5 will be DOWN Tuesday and Wednesday October 1st and 2nd for a turbo upgrade. We will send out an email Wednesday once the system is up and running. Silva 15:19, 29 September 2019 (PDT)

Suss Bonder

Suss Bonder is DOWN. The vendor installed all the hardware but failed to get the software to work. The vendor will be back sometime next week, the week of the 16th, to complete the repair/upgrade. Silva 15:59, 13 September 2019 (PDT)