Template:Announcements

From UCSB Nanofab Wiki
Revision as of 16:33, 14 March 2019 by Silva (talk | contribs)
Jump to navigation Jump to search

Equipment Status

Suss Bonder

Suss fieldservice found several issues with the system. Suss will evaluate the issues and recommend possible solutions. // Silva 21:36, 13 February 2019 (PST)

ASML DUV: PM March 12 to 15th

ASML will be performing their periodic maintenance on the DUV stepper from MONDAY March 11th through WEDNESDAY March 15th. Please schedule your work accordingly. Thibeault 12:57, 8 March 2019 (PST)

GCA 6300 Stepper Maintenance

The GCA 6300 Stepper maintenance is scheduled to start Monday April 1, 2019 at 8:30 am. The service should be finished by Wednesday April 3, 2019 at 6:00 pm. Please schedule you process accordingly. Silva 17:56, 5 March 2019 (PST)

GCA Autostep 200 Maintenance

The GCA Autostep 200 maintenance is scheduled to start Monday April 4, 2019 at 8:30 am. The service should be finished the same day by 6:00 pm. Please schedule you process accordingly. Silva 17:56, 5 March 2019 (PST)

IBD Maintenance

The IBD will be down starting Monday March 11, 2019 at 9:00 am for maintenance. This system service will take two to three weeks to complete. Silva 10:22, 7 March 2019 (PST)

Joel SEM

The SEM is down. The load arm has an issue. We are working on getting the vendor in to make the repair. Silva 17:33, 14 March 2019 (PDT)

Ebeam#2

Ebeam#2 is down. Chamber tooling was crushed by the bell jar. The repairs are in the works. Silva 17:33, 14 March 2019 (PDT)