Difference between revisions of "Template:Announcements"
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===== SLR Fluorine ICP Etch ===== |
===== SLR Fluorine ICP Etch ===== |
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| + | The turbo upgrade has been postponed. I will update you once the new installation date has been established. |
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| − | The system will be down May 23 and May 24, 2019 to integrate a new maglev turbo pump. |
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| − | [[User:Silva|Silva]] |
+ | [[User:Silva|Silva]] 10:19, 28 May 2019 (PDT) |
<!---------- end of Equipment Status ------------> |
<!---------- end of Equipment Status ------------> |
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Revision as of 10:19, 28 May 2019
Equipment Status
Lab is OPEN
Campus facilities finished the exhaust fan install sooner than expected. Cleanroom exhaust is up and running and the lab is safe to enter. // John d 09:37, 24 May 2019 (PDT)
Suss Bonder
Suss Bonder is DOWN. Suss field service is sourcing replacement parts for the bonder repair. An update will be sent out once we have a date scheduled for the service. Silva 10:45, 12 April 2019 (PDT)
SLR Fluorine ICP Etch
The turbo upgrade has been postponed. I will update you once the new installation date has been established. Silva 10:19, 28 May 2019 (PDT)