Difference between revisions of "Template:Announcements"

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===== SLR Fluorine ICP Etch =====
 
===== SLR Fluorine ICP Etch =====
The system will be down Monday May 13 and Tuesday May 14, 2019 to integrate a new maglev turbo pump.
+
The system will be down May 23 and May 24, 2019 to integrate a new maglev turbo pump.
 
[[User:Silva|Silva]] 07:15, 2 May 2019 (PDT)
 
[[User:Silva|Silva]] 07:15, 2 May 2019 (PDT)
  

Revision as of 12:29, 2 May 2019

Equipment Status

Suss Bonder

Suss Bonder is DOWN. Suss field service is sourcing replacement parts for the bonder repair. An update will be sent out once we have a date scheduled for the service. Silva 10:45, 12 April 2019 (PDT)

SLR Fluorine ICP Etch

The system will be down May 23 and May 24, 2019 to integrate a new maglev turbo pump. Silva 07:15, 2 May 2019 (PDT)