Difference between revisions of "Template:Announcements"

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The system is down. The E-Beam#1 power supply and control upgrade started today. We hope to complete the process within 10 business days. We will keep you posted as progress is made.  
 
The system is down. The E-Beam#1 power supply and control upgrade started today. We hope to complete the process within 10 business days. We will keep you posted as progress is made.  
 
// [[User:Silva|Silva]] 21:45, 11 February 2019 (PST)
 
// [[User:Silva|Silva]] 21:45, 11 February 2019 (PST)
 
===== PECVD#1 =====
 
The system is down. There is a pumping issue with the tool. The issue will be addressed Tuesday.
 
[[User:Silva|Silva]] 16:32, 17 February 2019 (PST)
 
  
 
===== RIE#5 =====
 
===== RIE#5 =====

Revision as of 12:09, 18 February 2019

Equipment Status

Suss Bonder

Suss fieldservice found several issues with the system. Suss will evaluate the issues and recommend possible solutions. // Silva 21:36, 13 February 2019 (PST)

KLA Tencor Surfscan

The system is down. The vendor has located a replacement PCB. Once the board is secured, the vendor will schedule a visit and finish the system repairs. // Silva 21:51, 11 February 2019 (PST)

E-Beam#1

The system is down. The E-Beam#1 power supply and control upgrade started today. We hope to complete the process within 10 business days. We will keep you posted as progress is made. // Silva 21:45, 11 February 2019 (PST)

RIE#5

The system is down. The system has a wafer transfer error. The system will be looked at tomorrow. Silva 10:11, 18 February 2019 (PST)

IBD

The system is down. The load lock ion gauge has failed. The gauge will be replaced tomorrow. Silva 10:11, 18 February 2019 (PST)

ASML DUV: PM March 12 to 15th

ASML will be performing their periodic maintenance on the DUV stepper from Tuesday March 12th through Friday March 15th. Please schedule your work accordingly. // John d 11:02, 15 February 2019 (PST)