Difference between revisions of "Template:Announcements"

From UCSB Nanofab Wiki
Jump to navigation Jump to search
Line 17: Line 17:
 
[[User:Silva|Silva]] 07:57, 19 June 2019 (PDT)
 
[[User:Silva|Silva]] 07:57, 19 June 2019 (PDT)
   
===== ASML Stepper #3: Periodic Maintenance =====
+
===== ASML Stepper #3: System Up =====
  +
ASML PM complete - System up
ASML will be performing their quarterly maintenance on [[Stepper 3 (ASML DUV)|Stepper #3]] from Monday June 17th to Friday June 21st. Exact days may vary, we will email updates when we know exactly which days the tool will be closed.
 
// [[User:John d|John d]] 12:55, 28 May 2019 (PDT)
+
// [[User:Thibeault|Thibeault]] 08:08, 21 June 2019 (PDT)
   
 
<!---------- end of Equipment Status ------------>
 
<!---------- end of Equipment Status ------------>

Revision as of 08:08, 21 June 2019

Equipment Status

Suss Bonder

Suss Bonder is DOWN. Suss field service is sourcing replacement parts for the bonder repair. An update will be sent out once we have a date scheduled for the service. Silva 10:45, 12 April 2019 (PDT)

SLR Fluorine ICP Etch

The turbo upgrade on the SLR Fluorine ICP Etch will start Thursday June 20, 2019 and will conclude Friday afternoon. Silva 07:57, 19 June 2019 (PDT)

ASML Stepper #3: System Up

ASML PM complete - System up // Thibeault 08:08, 21 June 2019 (PDT)