Difference between revisions of "Template:Announcements"
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(nanofab open, asml down) |
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===== ASML is DOWN ===== |
===== ASML is DOWN ===== |
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| − | + | Level sensor failed, suspect it is just a halogen light bulb. ASML support staff is unavailable until Jan 2nd due to vacations. Will work on it as soon as we get the procedure from ASML. |
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| − | // [[User:John d|John d]] |
+ | // [[User:John d|John d]] 10:01, 30 December 2019 (PST) |
===== Unaxis ICP-PECVD ===== |
===== Unaxis ICP-PECVD ===== |
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Revision as of 11:01, 30 December 2019
Equipment Status
Nanofab is OPEN
The cleanroom is now open. // John d 08:50, 28 December 2019 (PST)
ASML is DOWN
Level sensor failed, suspect it is just a halogen light bulb. ASML support staff is unavailable until Jan 2nd due to vacations. Will work on it as soon as we get the procedure from ASML. // John d 10:01, 30 December 2019 (PST)
Unaxis ICP-PECVD
The ICP-PECVD module is down for general use. We are conducting experiments with the Deuterated Silane and are not allowing general use of the tool. Silva 15:04, 19 November 2019 (PST)
Suss Bonder
Suss Bonder is DOWN. The vendor is struggling to get the software and hardware upgrades to work. We have a meeting next week, 10/28/19, to discuss options. Silva 11:16, 25 October 2019 (PDT)