Difference between revisions of "Template:Announcements"
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===== PECVD#1: Software Upgrade ===== |
===== PECVD#1: Software Upgrade ===== |
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| − | We are going to upgrade the computer and software on PECVD#1 |
+ | We are going to upgrade the computer and software on PECVD#1 middle to late september. |
| + | Once the upgrade is complete, everyone will need to be retrained on the new software. We will send out an email when we know the exact dates. |
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| − | // [[User:John d|John d]] |
+ | // [[User:John d|John d]] 09:55, 7 August 2018 (PDT) |
===== RIE#5: SiCl4 Issue ===== |
===== RIE#5: SiCl4 Issue ===== |
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Revision as of 09:55, 7 August 2018
UCSB NanoFab Announcements
Ebeam#2: heater inoperable
The heater is damaged beyond our ability to repair it. We have contacted the vendor and asked for an "expedited" repair if possible. // John d 13:51, 25 July 2018 (PDT)
PECVD#1: Software Upgrade
We are going to upgrade the computer and software on PECVD#1 middle to late september. Once the upgrade is complete, everyone will need to be retrained on the new software. We will send out an email when we know the exact dates. // John d 09:55, 7 August 2018 (PDT)
RIE#5: SiCl4 Issue
We have a flow rate problem on the SiCl4 gas line. You can only flow the SiCl4 for 5 minutes and then you have to wait 5 minutes before you flow it again. So in order to to do a 10 minute Etch you will have to do it in three steps flow 5 mi, wait 5mi, then flow 5min. // John d 17:22, 15 June 2018 (PDT)