Difference between revisions of "Template:Announcements"
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The Nanofab is open. The tools below are still down and we are working to get them running. I'll send out an email for each tool below when it is ready to run. |
The Nanofab is open. The tools below are still down and we are working to get them running. I'll send out an email for each tool below when it is ready to run. |
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| − | Ebeam #4 is in regen |
+ | * Ebeam #4 is in regen |
| − | IBD |
+ | * IBD |
| − | Unaxis VLR |
+ | * Unaxis VLR |
Be aware that the Holiday Fire could cause further power outages, especially at night. |
Be aware that the Holiday Fire could cause further power outages, especially at night. |
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Revision as of 10:15, 7 July 2018
UCSB NanoFab Announcements
LAB OPEN
The Nanofab is open. The tools below are still down and we are working to get them running. I'll send out an email for each tool below when it is ready to run.
- Ebeam #4 is in regen
- IBD
- Unaxis VLR
Be aware that the Holiday Fire could cause further power outages, especially at night. // John d 10:14, 7 July 2018 (PDT)
PlasmaTherm SLR: Down
The SLR fluorine etcher is down, the turbo has failed. Will work on it on Monday. // John d 22:04, 6 July 2018 (PDT)
PECVD#1: Software Upgrade
We are going to upgrade the computer and software on PECVD#1 in 2–3 weeks. The tool will be down for three to five days. Once the upgrade is complete, everyone will need to be retrained on the new software. You should start planning accordingly, if you use this tool. We will send out an email when we know the exact dates. // John d 15:05, 20 June 2018 (PDT)
RIE#5: SiCl4 Issue
We have a flow rate problem on the SiCl4 gas line. You can only flow the SiCl4 for 5 minutes and then you have to wait 5 minutes before you flow it again. So in order to to do a 10 minute Etch you will have to do it in three steps flow 5 mi, wait 5mi, then flow 5min. // John d 17:22, 15 June 2018 (PDT)