Difference between revisions of "Template:Announcements"
Jump to navigation
Jump to search
(deleted old messaged, updated PECVD2) |
(stepper 2 down, deleted >1 week old annc.) |
||
| Line 8: | Line 8: | ||
<!----------------------------------------------> |
<!----------------------------------------------> |
||
<!------------- Announcements ----------------> |
<!------------- Announcements ----------------> |
||
| − | ===== |
+ | ===== Stepper #2: Down until Mon Morning ===== |
| + | It's been reported that the load arm is malfunctioning and recovery |
||
| − | The transfer rod has been replaced. Please be sure to insert the rod |
||
| + | steps are not working. I will take a look at the tool Monday morning. |
||
| − | slowly and carefully to ensure it doesn't get damaged again. If any |
||
| + | The system is down until further notice. |
||
| − | resistance, rotate left and right while maintaining forward pressure |
||
| ⚫ | |||
| − | and it will smoothly work through the o-rings. |
||
| ⚫ | |||
| − | |||
| − | ===== RIE#5 Up, SiCl4 now available ===== |
||
| − | SiCl4 is available for use. We tried a new line heater on the SiCl4 and that seemed to do the trick. The system is still pumping slow but is getting better. |
||
| − | // [[User:John d|John d]] 15:00, 27 April 2018 (PDT) |
||
===== PECVD#2: Open Soon ===== |
===== PECVD#2: Open Soon ===== |
||
Revision as of 19:23, 12 May 2018
UCSB NanoFab Announcements
Stepper #2: Down until Mon Morning
It's been reported that the load arm is malfunctioning and recovery steps are not working. I will take a look at the tool Monday morning. The system is down until further notice. // John d 19:23, 12 May 2018 (PDT)
PECVD#2: Open Soon
The Plasma Therm Cortex software update is complete, and the system is operational. Standard recipes requalified. Particle counts are now much lower and around historical levels. Software has a few issues being worked out. Training will be announced soon. // Thibeault 16:37, 10 May 2018 (PDT)