Difference between revisions of "Template:Announcements"
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===== Cary 500 Down ===== |
===== Cary 500 Down ===== |
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Revision as of 15:01, 27 April 2018
UCSB NanoFab Announcements
RIE#5 Up, SiCl4 now available
SiCl4 is available for use. We tried a new line heater on the SiCl4 and that seemed to do the trick. The system is still pumping slow but is getting better. // John d 15:00, 27 April 2018 (PDT)
PECVD#2: Down, Retraining required
The Plasma Therm Cortex software update is complete, and the system is operational. We still have some work to do before we start training users. We need to check particulate counts, and we need to qualify all the standard process recipes. If everything goes well with particulates, and film quality, we will start training sessions early next week. // John d 16:48, 26 April 2018 (PDT)
Stepper #2 AutoStep: UP
One RMS motor and motor control board was replaced. I ran setup without error. The system is up and ready for your use. // John d 12:50, 25 April 2018 (PDT)
Cary 500 Down
UV-Vis Detector Failure. Tool is able to used from 600nm and up. Looking into replacement options. // Posted: 13:47, 12 February 2018 (PST)