Difference between revisions of "Template:Announcements"
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// [[User:John d|John d]] 12:50, 25 April 2018 (PDT) |
// [[User:John d|John d]] 12:50, 25 April 2018 (PDT) |
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| − | ===== PECVD#2 |
+ | ===== PECVD#2: Down, Retraining required ===== |
The Plasma Therm Cortex software update is complete, and the system is operational. We still have some work to do before we start training users. We need to check particulate counts, and we need to qualify all the standard process recipes. |
The Plasma Therm Cortex software update is complete, and the system is operational. We still have some work to do before we start training users. We need to check particulate counts, and we need to qualify all the standard process recipes. |
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If everything goes well with particulates, and film quality, we will start training sessions early next week. |
If everything goes well with particulates, and film quality, we will start training sessions early next week. |
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Revision as of 16:48, 26 April 2018
UCSB NanoFab Announcements
Stepper #2 AutoStep: UP
One RMS motor and motor control board was replaced. I ran setup without error. The system is up and ready for your use. // John d 12:50, 25 April 2018 (PDT)
PECVD#2: Down, Retraining required
The Plasma Therm Cortex software update is complete, and the system is operational. We still have some work to do before we start training users. We need to check particulate counts, and we need to qualify all the standard process recipes. If everything goes well with particulates, and film quality, we will start training sessions early next week. // John d 16:48, 26 April 2018 (PDT)
The SiCl4 gas line is down until next week when we can change the gas panel. // John d 16:15, 26 April 2018 (PDT)
Cary 500 Down
UV-Vis Detector Failure. Tool is able to used from 600nm and up. Looking into replacement options. // Posted: 13:47, 12 February 2018 (PST)