Template:Announcements

UCSB NanoFab Announcements

RIE#5 Down Thurs 4/19

RIE #5 will be down al day next Thursday 4/19/18 so that we can work on the SiCl4 gas line. We are going to install a new MFC and some other components and we need a long time to pump and purge the line. // John d 13:48, 12 April 2018 (PDT)

BlueM Oven: UP

System is ready to run. // John d 10:49, 5 April 2018 (PDT)

ICP#2 Up

RF travelling wave error unable to be reproduced, recipes appear to run fine. // John d 10:21, 2 April 2018 (PDT)

ADT Dicing Saw: Intermittent Software Issue

One of the DB files keeps getting corrupted. We've restored the system back to the backup created yesterday afternoon and the saw is up and running. Looking into a longer term fix. If you created a new recipe within the last 5 days you may need to re-create it. // John d 21:43, 27 March 2018 (PDT)

EBeam #4: Re-Training Required

The upgrade is complete and working well. All users will be required to be trained again. The high voltage, sweep and turret controls are all new. // John d 12:13, 26 March 2018 (PDT)

PECVD #2: UP with possible High Particulates

We are still experiencing high particle counts in the Advanced Vacuum PECVD process. Our next step is to replace the Silane MFC. I will update you once I have a lead time on the new MFC. Most likely it will take several weeks to receive. Until then, the system is operational and can be used if your process is not sensitive to high particle counts. // Posted: 13:22, 19 March 2018 (PDT)

Gasonics: Up

The process chamber mechanical pump is struggling to make base pressure but the system is able to successfully run. We are waiting for the replacement pump to be repaired and returned. // Posted: 10:14, 12 February 2018 (PST)

Cary 500 Down

UV-Vis Detector Failure. Tool is able to used from 600nm and up. Looking into replacement options. // Posted: 13:47, 12 February 2018 (PST)