Difference between revisions of "Template:Announcements"
(asml leveling error) |
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// [[User:John d|John d]] 12:29, 28 March 2018 (PDT) |
// [[User:John d|John d]] 12:29, 28 March 2018 (PDT) |
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| − | ===== IBD |
+ | ===== IBD is up ===== |
| + | Power supply replaced, system is up. |
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| − | A power supply failed this morning emitting smoke for a few hours, so you might still smell burning in the lab. |
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| ⚫ | |||
| − | A replacement is being installed. The system is down. |
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| ⚫ | |||
===== ADT Dicing Saw: Intermittent Software Issue ===== |
===== ADT Dicing Saw: Intermittent Software Issue ===== |
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Revision as of 21:09, 28 March 2018
UCSB NanoFab Announcements
ASML: Leveling Error
System will not expose due to possible leveling error on P-Chuck prior to exposure. Investigating. // John d 12:29, 28 March 2018 (PDT)
IBD is up
Power supply replaced, system is up. // John d 21:09, 28 March 2018 (PDT)
ADT Dicing Saw: Intermittent Software Issue
One of the DB files keeps getting corrupted. We've restored the system back to the backup created yesterday afternoon and the saw is up and running. Looking into a longer term fix. If you created a new recipe within the last 5 days you may need to re-create it. // John d 21:43, 27 March 2018 (PDT)
EBeam #4: Re-Training Required
The upgrade is complete and working well. All users will be required to be trained again. The high voltage, sweep and turret controls are all new. // John d 12:13, 26 March 2018 (PDT)
PECVD #2: UP with possible High Particulates
We are still experiencing high particle counts in the Advanced Vacuum PECVD process. Our next step is to replace the Silane MFC. I will update you once I have a lead time on the new MFC. Most likely it will take several weeks to receive. Until then, the system is operational and can be used if your process is not sensitive to high particle counts. // Posted: 13:22, 19 March 2018 (PDT)
Gasonics: Up
The process chamber mechanical pump is struggling to make base pressure but the system is able to successfully run. We are waiting for the replacement pump to be repaired and returned. // Posted: 10:14, 12 February 2018 (PST)
Cary 500 Down
UV-Vis Detector Failure. Tool is able to used from 600nm and up. Looking into replacement options. // Posted: 13:47, 12 February 2018 (PST)