Difference between revisions of "Template:Announcements"
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===== PECVD #2: Down ===== |
===== PECVD #2: Down ===== |
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| + | We found an issue that most likely contributed to the high particle |
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| − | The Advanced Vacuum PECVD#2 is DOWN. We will continue the |
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| + | count. We will verify the particle count on Monday. Until then, I will |
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| − | troubleshooting in the morning. |
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| + | release the system for use, but please assume the particle count is |
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| − | |||
| + | still high if running the tool before further notice. I will send out |
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| − | We have established that there is no external atmospheric leaks in the |
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| + | an email with the updated particle count Monday afternoon. |
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| − | system. We still have no explanation for the high particulate count. |
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| ⚫ | |||
| − | The troubleshooting will continue next week. |
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===== Stepper #2 Maintenance ===== |
===== Stepper #2 Maintenance ===== |
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Revision as of 17:24, 16 March 2018
UCSB NanoFab Announcements
EBeam #4: Down for Upgrades
Down through the week of Monday the 12th, installing new HV/Sweep controller.
Users will need retraining on these new components once the system is back up. // [[User:John d|Posted:] 09:50, 6 March 2018 (PST)
PECVD #2: Down
We found an issue that most likely contributed to the high particle count. We will verify the particle count on Monday. Until then, I will release the system for use, but please assume the particle count is still high if running the tool before further notice. I will send out an email with the updated particle count Monday afternoon. // Posted: 17:24, 16 March 2018 (PDT)
Stepper #2 Maintenance
The vendor will be servicing the GCA Autostep on Thursday March 15, 2018 at 8:00AM. The system will be up and running later that afternoon. Please plan your process accordingly. // Posted: 07:40, 21 February 2018 (PST)
Stepper #1 Maintenance Complete
3C is finished with the maintenance on the 6300 and the system is ready to use. Please let us know immediately if you encounter any issues. // Posted: 11:04, 16 March 2018 (PDT)
Gasonics: Up
The process chamber mechanical pump is struggling to make base pressure but the system is able to successfully run. We are waiting for the replacement pump to be repaired and returned. // Posted: 10:14, 12 February 2018 (PST)
Cary 500 Down
UV-Vis Detector Failure. Tool is able to used from 600nm and up. Looking into replacement options. // Posted: 13:47, 12 February 2018 (PST)