Difference between revisions of "Template:Announcements"
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===== PECVD #2: High Particulates ===== |
===== PECVD #2: High Particulates ===== |
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| + | We have established that there is no external atmospheric leaks in the |
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| − | Vacuum system restored. Particle cause identified but parts needed. |
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| + | system. We still have no explanation for the high particulate count. |
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| + | The troubleshooting will continue next week. |
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| + | |||
You can use system but particle counts still extremely high. Do not |
You can use system but particle counts still extremely high. Do not |
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| − | use if process sensitive to particles. |
+ | use if your process is sensitive to particles. |
| − | // [[User:John d| |
+ | // [[User:John d|John d]] ([[User talk:John d|talk]]) 08:07, 11 March 2018 (PDT) |
===== Stepper #2 Maintenance ===== |
===== Stepper #2 Maintenance ===== |
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Revision as of 08:07, 11 March 2018
UCSB NanoFab Announcements
EBeam #4: Down
Down through the week of Monday the 12th, installing new HV/Sweep controller.
Users will need retraining on these new components once the system is back up. // John d (talk) 09:50, 6 March 2018 (PST)
PECVD #2: High Particulates
We have established that there is no external atmospheric leaks in the system. We still have no explanation for the high particulate count. The troubleshooting will continue next week.
You can use system but particle counts still extremely high. Do not use if your process is sensitive to particles. // John d (talk) 08:07, 11 March 2018 (PDT)
Stepper #2 Maintenance
The vendor will be servicing the GCA Autostep on Thursday March 15, 2018 at 8:00AM. The system will be up and running later that afternoon. Please plan your process accordingly. // Posted: 07:40, 21 February 2018 (PST)
Stepper #1 Maintenance
The vendor will be here to service the GCA 6300 starting Monday March 12, 2018 at 8:00AM. The system will be down for three days for this service. We will send out an email if the service is completed before expected. Please plan your process accordingly. // Posted: 07:40, 21 February 2018 (PST)
Gasonics: Up
The process chamber mechanical pump is struggling to make base pressure but the system is able to successfully run. We are waiting for the replacement pump to be repaired and returned. // Posted: 10:14, 12 February 2018 (PST)
Cary 500 Down
UV-Vis Detector Failure. Tool is able to used from 600nm and up. Looking into replacement options. // Posted: 13:47, 12 February 2018 (PST)