SEM#1 (FEI): UP
The field service engineer has finished with the alignments and the system is ready to use. // John d 14:27, 21 September 2022 (PDT)
Stepper #2 (Autostep): UP
System up. Please note the maintenance schedule this week. // John d 10:54, 26 September 2022 (PDT)
E-Beam#2: Heater Down
EB2 Heated Processing is down // John d 15:40, 21 September 2022 (PDT)
Stepper#2 (AutoStep): UP
The maintenance tasks on the tool have been completed and the system is now available for use.
// John d 08:28, 28 September 2022 (PDT)
GCA 6300 Service
GCA 6300 will not be available for use while it is undergoing maintenance activities on 9-28-22 & 9-29-22.
// John d 08:33, 19 September 2022 (PDT)
MLA 150 Service & Software Revision
The MLA will be down beginning the evening of Monday October 3rd and should be back up sometime Friday October 7th. // L Sawyer 13:32, 31 August 2022 (PDT)
ASML Up; Network status
Nanofiles sync & JobCreator functionality is in the process of being restored. Batch_Reports are now syncing. JobCreator is working but local scripts are still being written + tested.
// John d 01:53, 17 September 2022 (PDT)