Revision as of 11:55, 13 August 2012

Surface Analysis (KLA/Tencor Surfscan)

Tool Type	Inspection, Test and Characterization
Location	Bay 5

Description	?
Manufacturer	Tencor

About

Revision as of 11:38, 13 August 2012 (view source) Biljana (talk \| contribs) (→‎Documentation) ← Older edit		Revision as of 11:55, 13 August 2012 (view source) Biljana (talk \| contribs) (→‎Documentation) Newer edit →
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	*[[media:SurfScan 6200-Operating Manual.pdf\|Operating Instruction Manual]]		*[[media:SurfScan 6200-Operating Manual.pdf\|Operating Instruction Manual]]
−	*[[media:Surfscan 6200 data.pdf\| Surfscan 6200 particle count]]	+	*[[media:Surfscan 6200 data.pdf\| Surfscan 6200 particle count data]]