Difference between revisions of "Surface Analysis (KLA/Tencor Surfscan)"

From UCSB Nanofab Wiki
Jump to navigation Jump to search
(→‎Documentation: link to SOP (blank))
Line 14: Line 14:
   
 
=Documentation=
  
=Documentation=
  +
*[[KLA-Tencor Surfscan - Standard Operating Procedure|Standard Operating Procedure]]
 
*[[media:Surfscan-Operation-Manual.pdf|Operations Manual]]
  
*[[media:Surfscan-Operation-Manual.pdf|Operations Manual]]
  +
**''For detailed measurement info, it is highly recommended that you read the manual.''
 
*[[media:Surfscan-Surfscan 6200 info.pdf|Surfscan Info]]
  
*[[media:Surfscan-Surfscan 6200 info.pdf|Surfscan Info]]
 
*[[Surfscan6200 photos]]
  
*[[Surfscan6200 photos]]

Revision as of 15:09, 25 March 2019

Surface Analysis (KLA/Tencor Surfscan)
KLA.jpg
Tool Type Inspection, Test and Characterization
Location Bay 5
Supervisor Biljana Stamenic
Supervisor Phone (805) 893-4002
Supervisor E-Mail biljana@ece.ucsb.edu
Description Surface Analysis 
KLA/Tencor Surfscan
Manufacturer Tencor


About

This system uses a laser-based scattering method to count size and distribution of particles (or other scattering defects) on a flat wafer surface. It can scan wafers in size from 4 to 6 inches.

Documentation

Retrieved from "https://wiki.nanofab.ucsb.edu/w/index.php?title=Surface_Analysis_(KLA/Tencor_Surfscan)&oldid=156172"