Difference between revisions of "Surface Analysis (KLA/Tencor Surfscan)"
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|super= Biljana Stamenic | |super= Biljana Stamenic | ||
|location=Bay 5 | |location=Bay 5 | ||
| − | |description = Surface Analysis | + | |description = Surface Analysis(KLA/Tencor Surfscan) |
|manufacturer = Tencor | |manufacturer = Tencor | ||
|materials = | |materials = | ||
Revision as of 10:13, 12 April 2016
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About
This system uses a laser-based scattering method to count size and distribution of particles (or other scattering defects) on a flat wafer surface.