Difference between revisions of "Surface Analysis (KLA/Tencor Surfscan)"

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|super= Biljana Stamenic
|super= Biljana Stamenic
|location=Bay 5
|location=Bay 5
|description = Surface Analysis (KLA/Tencor Surfscan)
|description = Surface Analysis(KLA/Tencor Surfscan)
|manufacturer = Tencor
|manufacturer = Tencor
|materials =
|materials =

Revision as of 10:13, 12 April 2016

Surface Analysis (KLA/Tencor Surfscan)
Tool Type Inspection, Test and Characterization
Location Bay 5
Supervisor Biljana Stamenic
Supervisor Phone (805) 893-4002
Supervisor E-Mail biljana@ece.ucsb.edu
Description Surface Analysis(KLA/Tencor Surfscan)
Manufacturer Tencor


This system uses a laser-based scattering method to count size and distribution of particles (or other scattering defects) on a flat wafer surface.