Difference between revisions of "Surface Analysis (KLA/Tencor Surfscan)"
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(added exmaple of low particle count) |
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|super= Biljana Stamenic |
|super= Biljana Stamenic |
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|location=Bay 5 |
|location=Bay 5 |
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− | |description = |
+ | |description = Surface Analysis |
+ | KLA/Tencor Surfscan |
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|manufacturer = Tencor |
|manufacturer = Tencor |
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|materials = |
|materials = |
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|toolid= |
|toolid= |
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}} |
}} |
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− | =About= |
+ | ==About== |
− | This system uses a laser-based scattering method to count size and distribution of particles (or other scattering defects) on a flat wafer surface. |
+ | This system uses a laser-based scattering method to count size and distribution of particles (or other scattering defects) on a flat wafer surface. It can scan wafers in size from 4 to 8 inches. |
− | =Documentation= |
+ | ==Documentation== |
+ | |||
⚫ | |||
+ | *[[KLA-Tencor Surfscan - Standard Operating Procedure|Standard Operating Procedure]] |
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⚫ | |||
+ | **''For detailed measurement info, it is highly recommended that you read the manual.'' |
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+ | *[[Wafer scanning process traveler]] |
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+ | *[[Glossary]] |
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+ | *[[Errors]] |
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+ | |||
+ | <br /> |
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+ | |||
+ | == Examples == |
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+ | <br /> |
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+ | {| class="wikitable" |
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+ | |+A low-particle 4-inch wafer example: |
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+ | !Gain 4: Small Particles |
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+ | (0.160µm – 1.60µm) |
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+ | !Gain 2: Large Particles |
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+ | (1.60µm – 28.0µm) |
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+ | |- |
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+ | |[[File:Surfscan Low-Particle Example - G4.png|frameless|200x200px]] |
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+ | |[[File:Surfscan Low-Particle Example - G2.png|frameless|200x200px]] |
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+ | |} |
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+ | {| class="wikitable" |
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+ | |+A high-particle 4-inch wafer example: |
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+ | !Gain 4: Small Particles |
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+ | (0.160µm – 1.60µm) |
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+ | !Gain 2: Large Particles |
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+ | (1.60µm – 28.0µm) |
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+ | |- |
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+ | |''To Be Added'' |
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+ | |''To Be Added'' |
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+ | |} |
Revision as of 15:09, 18 November 2021
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About
This system uses a laser-based scattering method to count size and distribution of particles (or other scattering defects) on a flat wafer surface. It can scan wafers in size from 4 to 8 inches.
Documentation
- Standard Operating Procedure
- Operations Manual
- For detailed measurement info, it is highly recommended that you read the manual.
- Wafer scanning process traveler
- Glossary
- Errors
Examples
Gain 4: Small Particles
(0.160µm – 1.60µm) |
Gain 2: Large Particles
(1.60µm – 28.0µm) |
---|---|
Gain 4: Small Particles
(0.160µm – 1.60µm) |
Gain 2: Large Particles
(1.60µm – 28.0µm) |
---|---|
To Be Added | To Be Added |