Stepper 2 (Autostep 200) - Table of Chucks, Shims, Target Thicknesses
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| SUBSTRATE/CHUCK | LOADING/CHUCK/SHIM | STEPPER | WAFER diameter | TARGET THICKNESS | ||||||
|---|---|---|---|---|---|---|---|---|---|---|
| Substrate size | CHUCK name | Substrate thickness=S | Pick right chuck | Shim | chuck size | wafer size | Chuck thickness=C | C+S=12.150( +/- 0.1)mm | COMMENT | |
| 1/4 of 2" or less | SMALL 1/4 of 2" chuck-500um | 350um=0.350mm | 1/4 of 2"/500um+shim | 130um | 142 | 50.8mm | 11.646mm | 11.646+0.350+0.130=12.126mm | OK | ≤350um, use shim 130-230um |
| (Adam:1/4 2") | 400um=0.500mm | 1/4of2"/500um+shim | 130um | 142 | 50.8mm | 11.646mm | 11.646+0.400+0.130=12.176mm | OK | (350-500)um, use shim 130-180um | |
| 500um=0.500mm | 1/4of2"/500um | no | 142 | 50.8mm | 11.646mm | 11.646+0.500=12.146mm | OK | |||
| 604um=0.604mm | 1/4of2"/500um | no | 142 | 50.8mm | 11.646mm | 11.646+0.604=12.25mm | OK | limit | ||
| 1/4 of 2" or less | SMALL 1/4 of 2" chuck-635um | 350um=0.350mm | 1/4of2"/635um+shim | 180um | 142 | 50.8mm | 11.536mm | 11.536+0.350+0.180=12.126mm | OK | ≤350um, use shim 180-260um |
| (Adam:1/4 2") | 500um=0.500mm | 1/4of2"/635um+shim | 130um | 142 | 50.8mm | 11.536mm | 11.536+0.500+0.130=12.166mm | OK | ||
| 635um=0.635mm | 1/4of2"/635um | no | 142 | 50.8mm | 11.536mm | 11.536+0.635=12.171mm | OK | |||
| 714um=0.635mm | 1/4of2"/635um | no | 142 | 50.8mm | 11.536mm | 11.536+0.714=12.250mm | OK | limit | ||
| 2" and smaller | SMALL 2" CHUCK-500um | 350um=0.35mm | 2"/500um+shim | 130um | 2 (for 2") | 50.8mm | 11.650mm | 11.650+0.350+0.130=12.130mm | OK | ≤350um, use shim 130-230um |
| (Adam:2") | 500um=0.500mm | 2"/500um | no | 2 (for 2") | 50.8mm | 11.650mm | 11.650+0.500=12.150mm | OK | ||
| 600um=0.600mm | 2"/500um | no | 2 (for 2") | 50.8mm | 11.650mm | 11.650+0.600=12.250mm | OK | limit | ||
| 3" and smaller | 3" CHUCK-635um | 350um=0.350mm | 3"/635um+shim | 130um | 3 (for 3") | 76.2mm | 11.570mm | 11.570+0.350+0.130=12.050mm | OK | ≤350um, use shim 130-260um |
| (Adam: 76.2mm) | 500um=0.500mm | 3"/635um | no | 3 (for 3") | 76.2mm | 11.570mm | 11.570+0.500=12.070mm | OK | ||
| 680um=0.680mm | 3"/635um | no | 3 (for 3") | 76.2mm | 11.570mm | 11.570+0.680=12.250mm | OK | limit | ||
| 4" and smaller | STANDARD CHUCK-500um | 350um=0.350mm | 4"/500um+shim | 130um | 100 (for 4") | 100mm | 11.630mm | 11.630+0.350+0.130=12.11mm | OK | ≤350um, use shim 130-260um |
| (Adam: 100mm) | 500um=0.500mm | 4"/500um | no | 100 (for 4") | 100mm | 11.630mm | 11.630+0.500=12.13mm | OK | ||
| 620um=0.620mm | 4"/500um | no | 100 (for 4") | 100mm | 11.630mm | 11.630+0.620=12.25mm | OK | limit | ||
| 4" and smaller | BIG METAL CHUCK | 350um=0.350mm | Al 100mm | 130um | 100 (for 4") | 100mm | 11.570mm | 11.570+0.350+0.130=12.050mm | OK | ≤350um, use shim 130-260um |
| ( Adam:Al 100mm) | 500um=0.500mm | Al 100mm | no | 100 (for 4") | 100mm | 11.570mm | 11.570+0.500=12.070mm | OK | ||
| 635um=0.635mm | Al 100mm | no | 100 (for 4") | 100mm | 11.570mm | 11.570+0.635=12.205mm | OK | |||
| 680um=0.680mm | Al 100mm | no | 100 (for 4") | 100mm | 11.570mm | 11.570+0.680=12.250mm | OK | limit | ||
| 4" and smaller | BLACK MULTI -720um | 350um=0.350mm | Black multi+shim | 260um | 7100 | 100mm | 11.440mm | 11.440+0.350+0.260=12.05mm | OK | limit |
| ( Adam:Black multi) | 500um=0.500mm | Black multi+shim | 130um | 7100 | 100mm | 11.440mm | 11.440+0.500+0.130=12.07mm | OK | use shim 130-230um | |
| 550um=0.550mm | Black multi+shim | 260um | 7100 | 100mm | 11.440mm | 11.440+0.550+0.260=12.25mm | OK | limit | ||
| 720um=0.720mm | Black multi | no | 7100 | 100mm | 11.440mm | 11.440+0.720=12.16mm | OK | |||
| 810um=0.810mm | Black multi | no | 7100 | 100mm | 11.440mm | 11.440+0.810=12.25mm | OK | limit | ||
| 4" and smaller | UNIVERSAL-1000um | 350um=0.350mm | Universal chuck+shim | 600um | 100 (for 4" or smaller) | 100mm | 11.200mm | 11.200+0.350+0.600=12.15mm | OK | use 600um shim |
| 500um=0.500mm | Universal chuck+shim | 450mm | 100 (for 4" or smaller) | 100mm | 11.200mm | 11.200+0.500+0.450=12.15mm | OK | use 450um shim | ||
| 635um=0.635mm | Universal chuck+shim | 260um | 100 (for 4" or smaller) | 100mm | 11.200mm | 11.200+0.635+0.260=12.095mm | OK | use 260um shim | ||
| 680um=0.680mm | Universal chuck+shim | 260um | 100 (for 4" or smaller) | 100mm | 11.200mm | 11.200+0.680+0.260=12.14mm | OK | use 260um shim | ||
| 1000um=1.000mm | Universal chuck+shim | no shim | 100 (for 4" or smaller) | 100mm | 11.200mm | 11.200+0.350+0.600=12.15mm | OK | |||
| 6" | We do have chuck | custom puddles | SHIMS: Shims can be cut from other material (cabinet next to stepper, first drawer. Shim Thickness: 0.01mm to 0.75mm (each color- represents different thickness) | |||||||
| Thinning down from 12.74 to 11.64! | 3C can make them | |||||||||