Stepper 1 (GCA 6300) Substrate Thickness, Shim Thickness ans Target Thickness

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SUBSTRATE LOADING/CHUCK STEPPER WAFER TARGET THICKNESS COMMENT
Substrate size CHUCK name Substarte Thickness=S Pick right chuck Shim chuck size wafer size Chuck tickness=C C+S=6.121mm ( +/- 0.100)
1/4 of 2" SMALL  1/4 of 2" 300um=0.300mm 1/4 of 2"+pink shim 400um 3 (for ≤3" substrate ) 50.8mm 5.804mm 5.804+0.300=6.104mm OK
or less 350um=0.350mm 1/4 of 2"+pink shim 400um 3 (for ≤3" substrate ) 50.8mm 5.804mm 5.804+0.350=6.154mm OK
420um=0.420mm 1/4 of 2"+pink shim 400um 3 (for ≤3" substrate ) 50.8mm 5.804mm 5.804+0.420=6.224mm OK limit
350um=0.350mm 1/4 of 2"+metal shim 380um 3 (for ≤3" substrate ) 50.8mm 5.404mm 5.404+0.380+0.350=6.134mm OK ≤350um, use shim 260-380um
500um=0.500mm 1/4 of 2"+metal shim 230um 3 (for ≤3" substrate ) 50.8mm 5.404mm 5.404+0.500+0.230=6.134mm OK ≥500um use shim 230-260um
620um=620mm 1/4 of 2" no 3 (for ≤3" substrate ) 50.8mm 5.404mm 5.404+0.620=6.024mm OK limit
820um=820mm 1/4 of 2" no 3 (for ≤3" substrate ) 50.8mm 5.404mm 5.404+0.820=6.224mm OK limit
2" SMALL  2" 300um=0.300mm 2"/500um+shim 230um 3 (for ≤3" substrate ) 50.8mm 5.525mm 5.525+0.300+0.230=6.055mm OK limit
300um=0.300mm 2"/500um+shim 240um 3 (for ≤3" substrate ) 50.8mm 5.525mm 5.525+0.300+0.240=6.065mm OK
300um=0.300mm 2"/500um+shim 260um 3 (for ≤3" substrate ) 50.8mm 5.525mm 5.525+0.300+0.260=6.085mm OK
300um=0.300mm 2"/500um+shim 380um 3 (for ≤3" substrate ) 50.8mm 5.525mm 5.525+0.300+0.380=6.205mm OK limit
350um=0.350mm 2"/500um+shim 230um 3 (for ≤3" substrate ) 50.8mm 5.525mm 5.525+0.350+0.230=6.105mm OK <350um, use shim 230-260um
500um=0.500mm 2"/500um no 3 (for ≤3" substrate ) 50.8mm 5.525mm 5.525+0.500=6.025mm OK limit
635um=0.630mm 2"/500um no 3 (for ≤3" substrate ) 50.8mm 5.525mm 5.525+0.635=6.160mm OK
700um=0.700mm 2"/500um no 3 (for ≤3" substrate ) 50.8mm 5.525mm 5.525+0.700=6.225mm OK limit
3" METAL 3" 300um=0.300mm 76mm/635um+shim 380um 3 (for ≤3" substrate ) 76.2mm 5.436mm 5.436+0.300+0.380=6.116mm OK
350um=0.350mm 76mm/635um+shim 380um 3 (for ≤3" substrate ) 76.2mm 5.436mm 5.436+0.350+0.380=6.166mm OK ≤350um, use shim 380um
500um=0.500mm 76mm/635um+shim 230um 3 (for ≤3" substrate ) 76.2mm 5.436mm 5.436+0.500+0.230=6.166mm OK
500um=0.500mm 76mm/635um+shim 240um 3 (for ≤3" substrate ) 76.2mm 5.436mm 5.436+0.500+0.240=6.176mm OK
500um=0.500mm 76mm/635um+shim 260um 3 (for ≤3" substrate ) 76.2mm 5.436mm 5.436+0.500+0.260=6.196mm OK
585um=0.720mm 76mm/635um no 3 (for ≤3" substrate ) 76.2mm 5.436mm 5.436+0.585=6.021mm OK limit
635um=0.635mm 76mm/635um no 3 (for ≤3" substrate ) 76.2mm 5.436mm 5.436+0.635=6.071mm OK
785um=0.720mm 76mm/635um no 3 (for ≤3" substrate ) 76.2mm 5.436mm 5.436+0.785=6.221mm OK limit
4" STANDARD 300um=0.300mm 4"/500um+shim 230um 100 ( for 4", metal chuck) 100mm 5.601mm 5.601+0.300+0.230=6.131mm OK ≤350um, use shim 230-260um
300um=0.300mm 4"/500um+shim 240um 100 ( for 4", metal chuck) 100mm 5.601mm 5.601+0.300+0.240=6.141mm OK
300um=0.300mm 4"/500um+shim 260um 100 ( for 4", metal chuck) 100mm 5.601mm 5.601+0.300+0.260=6.161mm OK
300um=0.300mm 4"/500um+shim 380um 100 ( for 4", metal chuck) 100mm 5.601mm 5.601+0.300+0.380=6.281mm NO
350um=0.350mm 4"/500um+shim 230um 100 ( for 4", metal chuck) 100mm 5.601mm 5.601+0.350+0.230=6.181mm OK
350um=0.350mm 4"/500um+shim 240um 100 ( for 4", metal chuck) 100mm 5.601mm 5.601+0.350+0.240=6.191mm OK
350um=0.350mm 4"/500um+shim 260um 100 ( for 4", metal chuck) 100mm 5.601mm 5.601+0.350+0.260=6.211mm OK limit
350um=0.300mm 4"/500um+shim 380um 100 ( for 4", metal chuck) 100mm 5.601mm 5.601+0.350+0.380=6.331mm NO
420um=0.620mm 4"/500um no 100 ( for 4", metal chuck) 100mm 5.601mm 5.601+0.420=6.021mm OK limit
500um=0.500mm 4"/500um no 100 ( for 4", metal chuck) 100mm 5.601mm 5.601+0.500=6.101mm OK
620um=0.620mm 4"/500um no 100 ( for 4", metal chuck) 100mm 5.601mm 5.601+0.620=6.221mm OK limit
4" METAL 4" 300um=0.300mm 4"/300um+shim 230um 100 ( for 4", metal chuck) 100mm 5.601mm 5.601+0.300+0.230=6.131mm OK ≤350um, use shim 230-260um
300um=0.300mm 4"/300um+shim 240um 100 ( for 4", metal chuck) 100mm 5.601mm 5.601+0.300+0.240=6.141mm OK
300um=0.300mm 4"/300um+shim 260um 100 ( for 4", metal chuck) 100mm 5.601mm 5.601+0.300+0.260=6.161mm OK
300um=0.300mm 4"/300um+shim 380um 100 ( for 4", metal chuck) 100mm 5.601mm 5.601+0.300+0.380=6.281mm NO
350um=0.350mm 4"/300um+shim 230um 100 ( for 4", metal chuck) 100mm 5.601mm 5.601+0.350+0.230=6.181mm OK
350um=0.350mm 4"/300um+shim 240um 100 ( for 4", metal chuck) 100mm 5.601mm 5.601+0.350+0.240=6.191mm OK
350um=0.350mm 4"/300um+shim 260um 100 ( for 4", metal chuck) 100mm 5.601mm 5.601+0.350+0.260=6.211mm OK limit
350um=0.300mm 4"/300um+shim 380um 100 ( for 4", metal chuck) 100mm 5.601mm 5.601+0.350+0.380=6.331mm NO
500um=0.500mm 4"/300um no 100 ( for 4", metal chuck) 100mm 5.601mm 5.601+0.500=6.101mm OK
620um=0.620mm 4"/500um no 100 ( for 4", metal chuck) 100mm 5.601mm 5.601+0.620=6.221mm OK limit
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