View source for Stepper 1 (GCA6300) How to select proper chuck

{| class="wikitable"
| colspan="3" |GCA 6300 CHUCKS
|-
|Chuck  Name/Wafer Size
|Substrate Thickness
|Chuck Thickness
|-
|
|
|
|-
|1/4 of 2"(and smaller)
|~717um (+/-100)
|5.404mm
|-
|1/4 of 2"(and smaller)
|~317um (+/-100)
|with pink shim(0.40mm)=5.804mm
|-
|1/4 of 2"(and smaller)
|~487um (+/-100)
|with metal shim(0.23mm)=5.634mm
|-
|2" (and smaller)
|~596um (+/-100)
|5.525mm
|-
|3" (and smaller)
|~685um (+/-100)
|5.436mm
|-
|4" (and smaller)
|~520um (+/-100)
|5.601mm
|-
|4" (and smaller)
|~520um (+/-100)
|5.601mm
|-
|
|
|
|-
| colspan="3" |TARGET THICKNESS: ~6.121mm +/- 0.1mm (100um)
|-
| colspan="3" |Target Thickness=Chuck Thickness+Wafer Thickness
|-
| colspan="3" |Limits on Hight/Focus Dispay on Voltmeter ( +/- 10V),  Ideal ≈ 0V
|-
|
|
|
|-
| colspan="3" |NOTE: DO NOT OVER TIGHTEN SCREWS!
|-
| colspan="3" |Please be careful tightening the screws while using shims with the stepper chucks. It is easy to over tighten the screws  and strip out the chucks. Also, if you notice a screw head is being stripped, please discard the screw and use a new one.
|}