Step Profilometer (KLA Tencor P-7)

Step Profilometer (KLA Tencor P-7) Tool Type Inspection, Test and Characterization Location Bay 4 Supervisor Brian Lingg Supervisor Phone (805) 893-8145 Supervisor E-Mail lingg_b@ucsb.edu Description Surface Profilometer Manufacturer KLA Tencor

About

The KLA Tencor info will be here

Detailed Specifications

• Probe Tip has a 2um radius and a 60 degree angle
• Maximum wafer size: ____
• 1D Profile and 2D Raster Scanning
• Lateral Resolution: _____
• Height Resolution: _____

Instructions

• Basic profile instructions
• Saving+Extracting Profile Data