Difference between revisions of "Step Profilometer (KLA Tencor P-7)"
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==About== |
==About== |
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| + | The KLA-Tencor P7 profilometer is a stylus profilometer that drags a stylus across the wafer surface with controlled pressure, aligned via microcope, and measures the step-heights of surface features during the measurement. The system has a motor-controlled stage for X/Y/Rotation, and is typically used to measure step heights in single areas on various sample sizes frmo small pieces to 4-inch wafers. It can be programmed to scan multiple locations on a single wafer or 3D areas topography. |
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| − | The KLA Tencor info will be here |
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==Detailed Specifications== |
==Detailed Specifications== |
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Revision as of 16:08, 28 February 2022
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About
The KLA-Tencor P7 profilometer is a stylus profilometer that drags a stylus across the wafer surface with controlled pressure, aligned via microcope, and measures the step-heights of surface features during the measurement. The system has a motor-controlled stage for X/Y/Rotation, and is typically used to measure step heights in single areas on various sample sizes frmo small pieces to 4-inch wafers. It can be programmed to scan multiple locations on a single wafer or 3D areas topography.
Detailed Specifications
- Probe Tip has a 2um radius and a 60 degree angle
- Maximum wafer size: ____
- 1D Profile and 2D Raster Scanning
- Lateral Resolution: _____
- Height Resolution: _____