Difference between revisions of "Step Profilometer (KLA Tencor P-7)"

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{{tool|{{PAGENAME}}
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{{tool2|{{PAGENAME}}
|picture=Dektak6M.jpg
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|picture=KLA-Tencor-P7_Photo.JPG
 
|type = Inspection, Test and Characterization
 
|type = Inspection, Test and Characterization
|super= Brian Lingg
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|super= Bill Millerski
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|super2= Aidan Hopkins
 
|phone=(805)839-3918x210
 
|phone=(805)839-3918x210
 
|location=Bay 4
 
|location=Bay 4
|email=lingg_b@ucsb.edu
 
 
|description = Surface Profilometer
 
|description = Surface Profilometer
 
|manufacturer = KLA Tencor
 
|manufacturer = KLA Tencor
 
|materials =  
 
|materials =  
 
}}  
 
}}  
= About =
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==About==
The Dektak VI is a profilometer for measuring step heights or trench depths on a surface. This is a surface contact measurement technique where a very low force stylus is dragged across a surface. The Dektak VI offers Windows based data acquisition, data analysis, and equipment control. The force of the tip on the surface is adjustable from .03 mg to 15 mg, allowing for the measuring of hard and soft surfaces. A stress measurement option is also included with this tool. The profilometer can measure to a depth of over 1 mm, allowing for direct measurement of MEMs type structures. Lateral resolution is tip-shape dependent and vertical resolution is 1A (when using the 6.55 mm range). The lateral resolution is limited by the tip shape. A video camera with variable magnification allows for manual placement of the stylus using the manual X, Y, Theta stage. Software analysis can determine roughness, average step height, etc.
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The KLA-Tencor P7 profilometer is a stylus profilometer that drags a stylus across the wafer surface with controlled pressure, aligned via microcope, and measures the step-heights of surface features during the measurement. The system has a motor-controlled stage for X/Y/Rotation, and is typically used to measure step heights in single areas on various sample sizes frmo small pieces to 4-inch wafers. It can be programmed to scan multiple locations on a single wafer or 3D areas topography.
  
=Detailed Specifications=
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==Detailed Specifications==
*20 mm maximum sample thickness
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*.03 mg to 15 mg variable tip force
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*Probe Tip has a 2um radius and a 60 degree angle
*Height/Depth measurements to 1 mm
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*Maximum wafer size: ____
*1 A vertical resolution at 6.5 um full scale
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*1D Profile and 2D Raster Scanning
*Standard stylus radius is 12.5 um, optional 2 um stylus available
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*Lateral Resolution: _____
*6 inch stage diameter with manual controls for moving and leveling
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*Height Resolution: _____
*Software data leveling and other analysis including stress
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*Full GUI-based Windows control and data storage and exporting capability
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==Instructions==
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*[[KLA Tencor P7 - Basic profile instructions|Basic profile instructions]]
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*[[KLA Tencor P7 - Saving Profile Data|Saving+Extracting Profile Data]]

Latest revision as of 10:56, 30 August 2022

Step Profilometer (KLA Tencor P-7)
KLA-Tencor-P7 Photo.JPG
Location Bay 4
Tool Type Inspection, Test and Characterization
Manufacturer KLA Tencor
Description Surface Profilometer

Primary Supervisor Bill Millerski
(805) 893-2655
wmillerski@ucsb.edu

Secondary Supervisor

Aidan Hopkins


Recipes N/A


About

The KLA-Tencor P7 profilometer is a stylus profilometer that drags a stylus across the wafer surface with controlled pressure, aligned via microcope, and measures the step-heights of surface features during the measurement. The system has a motor-controlled stage for X/Y/Rotation, and is typically used to measure step heights in single areas on various sample sizes frmo small pieces to 4-inch wafers. It can be programmed to scan multiple locations on a single wafer or 3D areas topography.

Detailed Specifications

  • Probe Tip has a 2um radius and a 60 degree angle
  • Maximum wafer size: ____
  • 1D Profile and 2D Raster Scanning
  • Lateral Resolution: _____
  • Height Resolution: _____

Instructions