Difference between revisions of "Step Profilometer (KLA Tencor P-7)"
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(link to photo KLA-Tencor-P7_Photo.JPG) |
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|picture=KLA-Tencor-P7_Photo.JPG |
|picture=KLA-Tencor-P7_Photo.JPG |
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|type = Inspection, Test and Characterization |
|type = Inspection, Test and Characterization |
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| − | |super= |
+ | |super= Bill Millerski |
|phone=(805)839-3918x210 |
|phone=(805)839-3918x210 |
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|location=Bay 4 |
|location=Bay 4 |
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| − | |email=lingg_b@ucsb.edu |
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|description = Surface Profilometer |
|description = Surface Profilometer |
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|manufacturer = KLA Tencor |
|manufacturer = KLA Tencor |
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|materials = |
|materials = |
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}} |
}} |
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| − | == |
+ | ==About== |
| + | The KLA-Tencor P7 profilometer is a stylus profilometer that drags a stylus across the wafer surface with controlled pressure, aligned via microcope, and measures the step-heights of surface features during the measurement. The system has a motor-controlled stage for X/Y/Rotation, and is typically used to measure step heights in single areas on various sample sizes frmo small pieces to 4-inch wafers. It can be programmed to scan multiple locations on a single wafer or 3D areas topography. |
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| − | The KLA Tencor info will be here |
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==Detailed Specifications== |
==Detailed Specifications== |
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| − | *More info to go here |
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| + | *Probe Tip has a 2um radius and a 60 degree angle |
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| + | *Maximum wafer size: ____ |
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| ⚫ | |||
| + | *1D Profile and 2D Raster Scanning |
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| + | *Lateral Resolution: _____ |
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| + | *Height Resolution: _____ |
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| + | *[[KLA Tencor P7 - Saving Profile Data|Saving+Extracting Profile Data]] |
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Revision as of 16:08, 28 February 2022
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About
The KLA-Tencor P7 profilometer is a stylus profilometer that drags a stylus across the wafer surface with controlled pressure, aligned via microcope, and measures the step-heights of surface features during the measurement. The system has a motor-controlled stage for X/Y/Rotation, and is typically used to measure step heights in single areas on various sample sizes frmo small pieces to 4-inch wafers. It can be programmed to scan multiple locations on a single wafer or 3D areas topography.
Detailed Specifications
- Probe Tip has a 2um radius and a 60 degree angle
- Maximum wafer size: ____
- 1D Profile and 2D Raster Scanning
- Lateral Resolution: _____
- Height Resolution: _____