Difference between revisions of "Step Profilometer (KLA Tencor P-7)"

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== About ==
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==About==
 
The KLA Tencor info will be here
  
The KLA Tencor info will be here
   
 
==Detailed Specifications==
  
==Detailed Specifications==
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*More info to go here
  
   
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*Probe Tip has a 2um radius and a 60 degree angle
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== Instructions ==
  
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*Maximum wafer size: ____
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* [[KLA Tencor P7 - Basic profile instructions|Basic profile instructions]]
  
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*1D Profile and 2D Raster Scanning
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* [[KLA Tencor P7 - Saving Profile Data|Saving+Extracting Profile Data]]
  
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*Lateral Resolution: _____
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*Height Resolution: _____
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  ⚫
==Instructions==
  +
  ⚫
*[[KLA Tencor P7 - Basic profile instructions|Basic profile instructions]]
  ⚫
*[[KLA Tencor P7 - Saving Profile Data|Saving+Extracting Profile Data]]

Revision as of 11:46, 6 September 2019

Step Profilometer (KLA Tencor P-7)
KLA-Tencor-P7 Photo.JPG
Tool Type Inspection, Test and Characterization
Location Bay 4
Supervisor Brian Lingg
Supervisor Phone (805) 893-8145
Supervisor E-Mail lingg_b@ucsb.edu
Description Surface Profilometer
Manufacturer KLA Tencor


About

The KLA Tencor info will be here

Detailed Specifications

  • Probe Tip has a 2um radius and a 60 degree angle
  • Maximum wafer size: ____
  • 1D Profile and 2D Raster Scanning
  • Lateral Resolution: _____
  • Height Resolution: _____

Instructions

Retrieved from "https://wiki.nanofab.ucsb.edu/w/index.php?title=Step_Profilometer_(KLA_Tencor_P-7)&oldid=156653"