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Back to Vacuum Deposition Recipes.
IBD Calibrations Spreadsheet - Records of historical film depositions (rates, indices), Uniformity etc.
SiO2 deposition (IBD)
- SiO2 dep
- Refractive Index: ≈1.485
- Rate: ≈6.1nm/min (users must calibrate this prior to critical deps)
- Stress ≈ -320MPa (compressive)
SiN deposition (IBD)
- Refractive Index ≈ 2.01
- Rate ≈ 4.5nm/min (users must calibrate this prior to critical deps)
- Stress ≈ -1756MPa (compressive)