Sputtering Recipes
Revision as of 11:17, 13 August 2013 by John d (talk | contribs) (→Ion Beam Deposition (Veeco NEXUS): added link to ibd calibrations spreadsheet)
Back to Vacuum Deposition Recipes.
Sputter 1 (Custom)
Sputter 2 (SFI Endeavor)
Sputter 3 (AJA ATC 2000-F)
Sputter 4 (AJA ATC 2200-V)
Sputter 5 (Lesker AXXIS)
Ion Beam Deposition (Veeco NEXUS)
IBD Calibrations Spreadsheet - Records of historical film depositions (rates, indices), Uniformity etc.