Difference between revisions of "Sputtering Recipes"

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(→‎Ion Beam Deposition (Veeco NEXUS): added link to ibd calibrations spreadsheet)
(→‎SiO{{sub|2}} deposition (IBD): added rate, index, stress)
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==SiO{{sub|2}} deposition (IBD)==
 
==SiO{{sub|2}} deposition (IBD)==
 
*{{fl|IBD-SiO2-Recipe.pdf|SiO{{Sub|2}} dep}}
 
*{{fl|IBD-SiO2-Recipe.pdf|SiO{{Sub|2}} dep}}
 +
* Refractive Index: ≈1.485
 +
* Rate: ≈6.1nm/min (users must calibrate this prior to critical deps)
 +
* Stress ≈ -320MPa (compressive)
  
 
==SiN deposition (IBD)==
 
==SiN deposition (IBD)==

Revision as of 12:36, 13 August 2013