Difference between revisions of "Sputtering Recipes"

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(→‎Ion Beam Deposition (Veeco NEXUS): added link to ibd calibrations spreadsheet)
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=[[Sputter 5 (Lesker AXXIS)]]=
 
=[[Sputter 5 (Lesker AXXIS)]]=
 
=[[Ion Beam Deposition (Veeco NEXUS)]]=
 
=[[Ion Beam Deposition (Veeco NEXUS)]]=
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[https://docs.google.com/spreadsheet/ccc?key=0AuBs1GfMrpnXcEdXanZQNko3X0lUcHhVUlNyYnVDUkE&usp=sharing IBD Calibrations Spreadsheet] - Records of historical film depositions (rates, indices), Uniformity etc.
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==SiO{{sub|2}} deposition (IBD)==
 
==SiO{{sub|2}} deposition (IBD)==
 
*{{fl|IBD-SiO2-Recipe.pdf|SiO{{Sub|2}} dep}}
 
*{{fl|IBD-SiO2-Recipe.pdf|SiO{{Sub|2}} dep}}

Revision as of 11:17, 13 August 2013