Difference between revisions of "Sputtering Recipes"
Jump to navigation
Jump to search
| Line 11: | Line 11: | ||
==SiN deposition (IBD)== |
==SiN deposition (IBD)== |
||
| + | *{{fl|IBD-SiN-recipe.pdf|SiN Recipe (IBD)}} |
||
*{{fl|SiNfilm.pdf|SiN Film Data (IBD)}} |
*{{fl|SiNfilm.pdf|SiN Film Data (IBD)}} |
||
*{{fl|SiNrecipedetails.pdf|SiN Recipe Details (IBD)}} |
*{{fl|SiNrecipedetails.pdf|SiN Recipe Details (IBD)}} |
||
Revision as of 10:17, 7 September 2012
Back to Vacuum Deposition Recipes.