Sputter 5 (AJA ATC 2200-V)

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Sputter 5 (AJA ATC 2200-V)
Tool Type Vacuum Deposition
Location Bay 3
Supervisor Tony Bosch
Supervisor Phone (805) 893-3486
Supervisor E-Mail bosch@ece.ucsb.edu
Description ?
Manufacturer AJA ATC 2200-V
Vacuum Deposition Recipes