Sputter 5 (AJA ATC 2200-V)

From UCSB Nanofab Wiki
Revision as of 10:15, 11 July 2012 by Zwarburg (talk | contribs) (Created page with "{{tool|{{PAGENAME}} |picture=Sputter5.jpg |type = Vacuum Deposition |super= Mike Silva |location=Bay 3 |description = ? |manufacturer = Kurt J Lesker |materials = |toolid= }}")
(diff) ← Older revision | Latest revision (diff) | Newer revision → (diff)
Jump to navigation Jump to search
Sputter 5 (AJA ATC 2200-V)
Sputter5.jpg
Tool Type Vacuum Deposition
Location Bay 3
Supervisor Mike Silva
Supervisor Phone (805) 893-3096
Supervisor E-Mail silva@ece.ucsb.edu
Description ?
Manufacturer Kurt J Lesker
Vacuum Deposition Recipes


Retrieved from "https://wiki.nanofab.ucsb.edu/w/index.php?title=Sputter_5_(AJA_ATC_2200-V)&oldid=905"