Difference between revisions of "Spin Rinse Dryer (SemiTool)"
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|type = Wet Processing |
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|manufacturer = SemiTool |
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Latest revision as of 11:02, 30 August 2022
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Two Spin-Rinse Dryers are available, one for 4-inch wafers and one for 6-inch wafers.
Each has a dedicated cassette that can hold up to 25 wafers.
The tool is set up to rinse at ~1000 rpm while spraying DI water, and then Dry in nitrogen at ~2000 rpm. A "Dry Only" option is also available.