Difference between revisions of "Spin Rinse Dryer (SemiTool)"

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(Created page with "{{tool|{{PAGENAME}} |picture=SpinRinse.jpg |type = Wet Processing |super= Don Freeborn |location=Bay 7 |description = ? |manufacturer = SemiTool }}")
 
 
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|type = Wet Processing
 
|type = Wet Processing
 
|super= Don Freeborn
 
|super= Don Freeborn
|location=Bay 7
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|location=Bay 5
 
|description = ?
 
|description = ?
 
|manufacturer =  SemiTool
 
|manufacturer =  SemiTool
 
}}
 
}}
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Two Spin-Rinse Dryers are available, one for 4-inch wafers and one for 6-inch wafers.
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 +
Each has a dedicated cassette that can hold up to 25 wafers.
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The tool is set up to rinse at ~1000 rpm while spraying DI water, and then Dry in nitrogen at ~2000 rpm.  A "Dry Only" option is also available.

Latest revision as of 09:22, 15 April 2020

Spin Rinse Dryer (SemiTool)
SpinRinse.jpg
Tool Type Wet Processing
Location Bay 5
Supervisor Don Freeborn
Supervisor Phone (805) 893-7975
Supervisor E-Mail dfreeborn@ece.ucsb.edu
Description ?
Manufacturer SemiTool



Two Spin-Rinse Dryers are available, one for 4-inch wafers and one for 6-inch wafers.

Each has a dedicated cassette that can hold up to 25 wafers.

The tool is set up to rinse at ~1000 rpm while spraying DI water, and then Dry in nitrogen at ~2000 rpm. A "Dry Only" option is also available.